000			00355nam a22001217a 4500
082			_222 _a621.38152
100			_aCampbell atephen,A.
245			_aThe Science and Engineering of Micro electronic Fabrication /
250			_a2nd.
260			_aOxfrod Universty Press, _bOxfrod Universty Press, _cc 2004.
300			_a603p,; _b ill,; _c23 cm.
942			_2ddc _cEE
999			_c369 _d369